高效PERC单晶硅太阳电池局部背表面场的工艺研究STUDY ON THE PROCESS OF LOCAL REAR SURFACE FIELD OF HIGH EFFICIENCY PERC MONOCRYSTALLINE SILICON SOLAR CELL
王丽婷,黄国平,黄惜惜,贾佳,周肃,李菁楠
摘要(Abstract):
钝化发射极和背面电池(PERC)的局部背表面场是指通过对电池背面的钝化层进行激光开槽形成局部接触。研究了激光参数设置和激光图形对电池背表面场局部接触的影响,根据电池转换效率来确定最佳的激光参数和激光图形。用奥林巴斯显微镜分析了在不同激光速度和不同激光实线比条件下,电池的背面铝浆填充率的变化;用Halm电学性能测试仪分析了在不同背面铝浆填充率和不同激光间距,以及背电极是否被激光覆盖这些条件下,电池电性能的变化趋势。结果表明,背面铝浆填充率为35%时,电池转换效率最佳。再根据不同激光速度和不同激光实线比的正交试验,反推出当激光速度为16000 m/s、激光实线比为50%时,更有利于提升电池转换效率;当激光开槽间距为1275μm时,电池转换效率最佳;背电极激光镂空与激光填满实验相比,背电极激光镂空的电池转换效率可增加约0.06%。
关键词(KeyWords): PERC;局部背表面场;激光开槽;激光参数;背电极;太阳电池
基金项目(Foundation): 国家自然科学基金(61874120);; 江苏省国际科技合作项目(BZ2017033)
作者(Author): 王丽婷,黄国平,黄惜惜,贾佳,周肃,李菁楠
参考文献(References):
- [1]SOUREN F,GAY X,DIELISSEN B,et al.Upgrade of an industrial Al-BSF solar cell line into PERC using spatial ALD Al2O3[C]//Proceedings of the 32nd European Photovoltaic Solar Energy Conference and Exhibition(eUPVSEC 2016),June 20-24,2016,Munich,German:946-950.
- [2]GRASSO F S,GAUTERO L,RENTSCH J,et al.Characterisation of local Al-BSF formation for PERCsolar cell structures[C]//Proceedings of the 25th European Photovoltaic Solar Energy Conference and Exhibition(EUPVSEC 2010),September 6-10,2010,Valencia,Spain:371-374.
- [3]LIN C M,FANG T,LI K J,et al.Metallization of rear-side passivated cells:Reducing cavities on localcontacts[C]//Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition(EU PVSEC 2011),September5-9,2011,Hamburg,German:2220-2222.
- [4]VERMANG B,GOVERDE H,ROTHSCHILD A,et al.High-throughput temporal ALD Al2O3 passivation as rearsurface passivation for industrial local Al BSF Si solar cells[C]//Proceedings of the 26th European Photovoltaic Solar Energy Conference and Exhibition(EU PVSEC 2011),September 5-9,2011,Hamburg,German:1739-1741.
- [5]JOONWICHIEN S,SHIRASAWA K,SIMAYI S,et al.Wet oxidation effects on the electrical and interface properties of ALD Al2O3 and ALD-AlOx/SiNx passivation stacks for PERC solar cells[C]//Proceedings of the 32nd European Photovoltaic Solar Energy Conference and Exhibition(EUPVSEC 2016),June 20-24,2016,Munich,German:660-663.
- [6]KRAUSE J,WOEHL R,BIROD,et al.Analysis of local Al-p+-layers for solar cells processed by small screenprinted structures[C]//Proceedings of the 25th European Photovoltaic Solar Energy Conference and Exhibition(EUPVSEC 2010),September 6-10,2010,Valencia,Spain:1899-1904.
- [7]黎剑骑,孙涌涛,楼彩霞,等.一种PERC电池背场激光开槽图形:CN201810725876.0[P].2019-02-01.
- [8]郁东旺,孙铁囤,姚伟忠.PERC电池背面激光开槽图案:CN201720700930.7[P].2017-12-29.
- [9]郁东旺,孙铁囤,姚伟忠.PERC电池背面激光开槽结构:CN201720700938.3[P].2017-12-29.
- [10]张金花,费存勇,赵福祥,等.一种适用于双面PERC电池背面激光开槽的方法:CN201910220227.X[P].2019-06-18.