中国可再生能源学会光伏专业委员会

• 1:中国可再生能源学会

摘要(Abstract)：

<正>目前TOPCon电池的一大任务就是如何简化制备工艺,以便最大限度地降低成本。图24给出了TOPCon电池的3种不同的工业化工艺流程,这3种工艺分别为LPCVD制备多晶硅膜结合传统的全扩散工艺、LPCVD制备多晶硅膜结合扩硼及离子注入磷工艺,以及PECVD制备多晶硅膜并原位掺杂工艺。

关键词(KeyWords)：

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 中国可再生能源学会光伏专业委员会

DOI: 10.19911/j.1003-0417.tyn2020.04

参考文献(References)：

• [11]CHUNDURI S K.Overview on high efficiency cell technologies[C]//第十五届中国太阳能级硅及光伏发电研讨会,上海,2019.
• [12]RAYMOND D M.Passivated contacts by hortus LPCVD[C]//第十五届中国太阳能级硅及光伏发电研讨会,上海,2019.
• [13]TUTSCH L,FELDMANN F,POLZIN J,et al.Implementing transparent conducting oxides by DCsputtering on ultrathin Si Ox/poly-Si passivating contacts[J].Solar energy materials&solar cells,2019,200:109960.
• [14]STODOLNY M K,LENES M,WU Y.n-Type polysilicon passivating contact for industrial bifacial n-type solar cells[J].Solar energy materials&solar cells,2016,158:24-28.
• [15]?IFTPINAR H E,HANDE E,STODOLNY M,et al.Study of screen printed metallization for polysilicon based passivating contacts[J].Energy procedia,2017,124:851-861.
• [16]LARIONOVA Y,REITER S,BRENDEL R,et al.Building blocks for industrial,screen-printed double-side contacted POLO cells with highly transparent Zn O:Al Layers[J].IEEE journal of photovoltaics,2018,(2018):1-7.
• [17]Xu X X.Micro-crystalline silicon oxide front contact layers for silicon heterojunction solar cells[C]//2nd International Workshop on SHJ Solar Cells,成都,2019.
• [18]ZHANG L P,et al.R&D of SHJ solar cell in SIMIT:From lab to hundreds MW industrial production[C]//2nd International Workshop on SHJ Solar Cells,成都,2019.
• [19]杨立友.晶体硅-非晶硅异质结电池量产技术进展[C]//第十四届中国太阳能级硅及光伏发电研讨会,西安,2018.
• [20]张闻斌.高效异质结(HJT)双面电池组件技术及其产业化进展[C]//第十五届中国太阳能级硅及光伏发电研讨会,上海,2019.
• [21]王树林.Challenges and opportunities of silicon based hetero-junction solar cells[C]//第十五届中国太阳能级硅及光伏发电研讨会,上海,2019.
• [22]TAGUCHI M,YANO A,TOHODA S,et al.24.7%Record efficiency HIT solar cell on thin silicon wafer[J].IEEEjournal of photovoltaics,2014,4(1):96-99.
• [23]ADACHI D,HERNNDEZ J L,YAMAMOTO K.Impact of carrier recombination on fill factor for large area heterojunction crystalline silicon solar cell with 25.1%efficiency[J].Applied physics letters,107(23):2335060.
• [24]YOSHIKAWA K,YOSHIDA W,IRIE T,et al.Exceeding conversion efficiency of 26%by heterojunction interdigitated back contact solar cell with thin film Si technology[J].Solar energy materials and solar cells,2017,173:37-42.