2020年中国光伏技术发展报告——晶体硅太阳电池研究进展(4)Report on 2020 China PV technology development——research progress of crystalline silicon solar cells(part 4)
中国可再生能源学会光伏专业委员会
摘要(Abstract):
<正>目前TOPCon电池的一大任务就是如何简化制备工艺,以便最大限度地降低成本。图24给出了TOPCon电池的3种不同的工业化工艺流程,这3种工艺分别为LPCVD制备多晶硅膜结合传统的全扩散工艺、LPCVD制备多晶硅膜结合扩硼及离子注入磷工艺,以及PECVD制备多晶硅膜并原位掺杂工艺。
关键词(KeyWords):
基金项目(Foundation):
作者(Author): 中国可再生能源学会光伏专业委员会
DOI: 10.19911/j.1003-0417.tyn2020.04
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