基于Matlab软件SiN_x/Si0_2叠层减反射膜厚度优化的研究
吕欣,崇锋,郭灵山,陈文浩
摘要(Abstract)：
SiN_x/SiO_2叠层膜作为减反射钝化膜在高效太阳电池中具有广泛的应用。本文采用光学导纳特征矩阵法,利用Matlab软件对SiN_x/SiO_2叠层膜的减反射效果进行系统理论研究。首次将AM1.5G光谱、透过叠层膜到达硅片表面光子数作为衡量标准,进行减反射膜的厚度优化研究。结果表明,优化后SiN_x/SiO_2叠层膜厚度为70nm+20nm时,透过叠层膜到达硅片表面光子数最多,达到2.618×10~(17)(1/s·cm~2)。
关键词(KeyWords)： Matlab;钝化;SiNx/SiO2减反射膜;反射率;光子
基金项目(Foundation):
作者(Author): 吕欣,崇锋,郭灵山,陈文浩
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