四甲基胍单晶硅片湿法制绒工艺研究STUDY ON WET TEXTURING PROCESS OF MONO-Si WAFERS BASED ON TETRAMETHYLGUANIDINE
赵徐禛,张嘉华,康桥,黄仕华
摘要(Abstract):
首次采用有机碱——四甲基胍替代传统的氢氧化钠或氢氧化钾作为制绒刻蚀剂,邻苯二酚和硅酸钠作为制绒添加剂进行单晶硅片制绒,并通过实验对不同四甲基胍浓度、邻苯二酚浓度、反应温度、反应时间对单晶硅片制绒的影响进行了分析。研究结果表明:制绒后单晶硅片表面的金字塔分布密集、大小均匀;在400~1000nm的波长范围内,单晶硅片的平均反射率为9.16%,比采用传统的碱醇制绒体系制绒时获得的反射率低;同时,该制绒方法还消除了传统制绒刻蚀液中金属离子对单晶硅片的污染。
关键词(KeyWords): 四甲基胍;单晶硅片;制绒;反射率
基金项目(Foundation): 浙江省重点研发计划项目(2021C01006)
作者(Author): 赵徐禛,张嘉华,康桥,黄仕华
DOI: 10.19911/j.1003-0417.tyn20210411.01
参考文献(References):
- [1] PAPET P, NICHIPORUK O, KAMINSKI A, et al.Pyramidal texturing of silicon solar cell with TMAH chemical anisotropic etching[J]. Solar energy materials and solar cells, 2006, 90(15):2319-2328.
- [2] ROSA M, ALLEGREZZA M, CANINO M, et al. TMAHtextured, a-Si/c-Si, heterojunction solar cells with 10%reflectance[J]. Solar energy materials and solar cells, 2011,95(11):2987-2993.
- [3] WANG H P, LIN T Y, HSU C W, et al. Realizing highefficiency omnidirectional n-type Si solar cells via the hierarchical architecture concept with radial junctions[J].Acs nano, 2013, 7(10):9325-9335.
- [4] GUPTA A, PAL P, SHARMA C S. Surface texturing of silicon{100}in an extremely low concentration TMAH for minimized reflectivity[J]. ECS journal of solid state science and technology, 2019, 8(10):622-628.
- [5] WANG F Y, ZHANG X D, WANG L G, et al. Pyramidal texturing of silicon surface via inorganic-organic hybrid alkaline liquor for heterojunction solar cells[J]. Journal of power sources, 2015, 293:698-705.