单面抛光在PERC电池中应用的研究
赵保星,赵增超,杨一鸣,谢湘洲
摘要(Abstract)：
研究一种实现背面抛光的方法,在制绒工序中以氮化硅为掩膜,对金刚线切割单晶硅片进行单面制绒,该掩膜在制绒工序中被HF酸去除。未制绒面作为背钝化电池背抛光面,在低刻蚀量条件下获得了微纳尺度平整的背表面,结果表明:该工艺方法将PERC电池双面钝化后少子寿命由109μs提升至230μs,开路电压由651.8 mV提升至661.0 mV,电池转换效率由20.32%提升至20.81%。
关键词(KeyWords)： PERC电池;背面抛光;掩膜;金刚线切割
基金项目(Foundation):
作者(Author): 赵保星,赵增超,杨一鸣,谢湘洲
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