磷杂质分布优化方法的研究
董鹏,屈小勇,张治,宋志成
摘要(Abstract)：
以优化磷在硅中杂质分布的工艺方案为研究对象,通过扩散机理分析和实验研究的方法,对影响磷杂质分布型的关键因子进行理论探讨与实验验证。研究结果表明:硅中电子浓度与荷电空位是影响磷杂质分布的主要因子,通过扩散工艺调节实现了低表面浓度、浅结的杂质分布,为提高晶硅电池的转化效率和批量生产提供了可能。
关键词(KeyWords)： 晶硅电池;磷杂质;扩散;杂质浓度分布;发射极
基金项目(Foundation):
作者(Author): 董鹏,屈小勇,张治,宋志成
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