离子注入技术在高效晶硅太阳电池中的应用
董鹏,宋志成,张治,屈小勇
摘要(Abstract)：
离子注入技术作为半导体领域中一项重要的掺杂工艺,将其应用到太阳电池中,可大幅提高电池转换效率。本文从工艺原理、工艺实现、关键技术难点、产业化情况等方面分析了离子注入技术。包括IBC电池在内,离子注入技术在未来高效晶硅电池中将扮演重要角色。
关键词(KeyWords)： 掺杂;离子注入;IBC电池
基金项目(Foundation):
作者(Author): 董鹏,宋志成,张治,屈小勇
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