利用蜂窝状涂层材料制备高效多晶硅锭Preparation of high-efficiency polycrystalline silicon ingots using bright tantalum coating materials
明亮,黄美玲,段金刚,邱昊,刘福刚,喻鹏辉
摘要(Abstract):
在石英坩埚制备氮化硅涂层过程中,通过对坩埚底部使用特殊的喷涂工艺,制备具有蜂窝状形貌的涂层作为多晶硅生长的形核点,生长出晶粒均匀的高效多晶硅锭。相比依靠同质籽晶形核的半熔有籽晶高效多晶硅铸锭技术,蜂窝状涂层材料制备高效多晶硅锭的方法具有无需保留籽晶、硅锭底部红区较短等优势;但其晶粒均匀度略差,位错密度相对较高,制作的太阳电池的平均转换效率比半熔有籽晶高效多晶硅锭制作的太阳电池的平均转换效率低约0.03%。
关键词(KeyWords): 涂层材料;蜂窝状;坩埚;形核;高效多晶硅
基金项目(Foundation):
作者(Author): 明亮,黄美玲,段金刚,邱昊,刘福刚,喻鹏辉
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