背钝化膜特性对PERC单晶硅太阳电池的影响研究Study on the influence of back passivation film characteristics on PERC monocrystalliner solar cell
李跃,苏世杰,陈绍光,刘文国,代囟,晁稳,彭春林,张龙飞
摘要(Abstract)：
研究了氧化铝膜与氮化硅膜厚度,以及氮化硅折射率对PERC单晶硅太阳电池电性能的影响,结果表明,氧化铝膜较薄、氮化硅膜较厚时,PERC单晶硅太阳电池的V_(oc)与I_(sc)明显提高,电池效率提升明显;并且结合不同工艺参数的少子寿命及量子效率,证明了背钝化膜钝化作用的优势。
关键词(KeyWords)： PERC单晶硅;钝化膜;少子寿命;量子效率
基金项目(Foundation):
作者(Author): 李跃,苏世杰,陈绍光,刘文国,代囟,晁稳,彭春林,张龙飞
参考文献(References)：
- [1]Green M A.The Passivated Emitter and Rear Cell(PERC):From conception to mass production[J].Solar Energy Materials&Solar Cells,2015,143:190-197.
- [2]Qiu Z,Liu C,Pan G,et al.Solution-processed solar cells based on inorganic bulk heterojunctions with evident hole contribution to photocurrent generation[J].Physical Chemistry Chemical Physics,2015,17(18):12328-12339.
- [3]Dullweber T,Schmidt J.Industrial Silicon Solar Cells Applying the Passivated Emitter and Rear Cell(PERC)Concept-AReview[J].IEEE Journal of Photovoltaics,2016,6(5):1366-1381.
- [4]Schmidt J,Werner F,Veith B,et al.Surface passivation of silicon solar cells using industrially relevant Al2O3 deposition techniques[J].Photovoltaics International the Technology Resource for PV Professionals,2010,10.
- [5]蔡先武,周子游,刘文峰.单晶硅PERC高效太阳电池量产工艺研究[J].太阳能,2017,(9):19-22.
- [6]陈伟,贾锐,张希清,等.晶体硅太阳电池表面钝化技术[J].微纳电子技术,2011,48(2):118-127.
- [7]赵永乐.Al2O3背钝化技术在PERC电池中的应用[A].中国光伏大会暨2014中国国际光伏展览会,北京,2014.
- [8]回双双,陆红艳,季静佳,等.PERC太阳电池背面SiNx折射率的优化[J].半导体技术,2014,39(6):447-451.