一种新型大尺寸多晶硅片晶向的光学扫描方法A NEW OPTICAL SCANNING METHOD FOR CRYSTAL ORIENTATION OF LARGE-SIZE POLYSILICON WAFER
熊震,付少永,李云珠,殷丽,张映斌
摘要(Abstract)：
提出了一种新型扫描大尺寸多晶硅片晶向的方法,该方法以晶粒表面光学3D各向形貌的分析为基础,通过2部相机直接采集得到晶粒的2D反射谱;每种不同晶向有其特定的表面形貌及对应的特征反射谱线,该特征反射谱线由理论推测而得,并与实验结果相符;晶粒的晶向指数可以由特征谱线峰值计算得出。本测试实现了对100×100 mm~2碱制绒硅片的晶向检测,测试时间小于10 min,检测精度小于1.34°。这种快速扫描晶向的方法可以用于高效多晶硅片的研发。
关键词(KeyWords)： 多晶硅片;晶向;扫描;反射
基金项目(Foundation): 江苏省自然科学基金资助项目(BK20170057)
作者(Author): 熊震,付少永,李云珠,殷丽,张映斌
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