基于激光掺杂的SE+PERC单晶硅太阳电池关键工艺的研究STUDY ON KEY PROCESSES OF SE+ PERC MONOCRYSTALLINE SILICON SOLAR CELLS BASED ON LASER DOPING
黄国平,王丽婷,邱家梁,黄惜惜,周肃,贾佳,李菁楠
摘要(Abstract):
在现阶段主流太阳电池生产设备的水平条件下,研究了激光频率、初始方块电阻和烧结峰值温度对基于激光掺杂的选择性发射极(SE)+PERC单晶硅太阳电池电性能的影响。分别采用奥林巴斯显微镜和Halm电学性能测试仪,分析了不同频率的激光在硅片表面形成的光斑形貌,以及不同实验条件时电池的电性能变化趋势。结果表明,激光频率为220 kHz时有利于在硅片表面形成连续性且不重叠的光斑,形成最佳重掺杂区,从而提升电池转换效率;基于现有的常压扩散设备的掺杂水平,在确保硅片表面方块电阻均匀性的情况下,初始方块电阻选择120Ω/□更有利于提升电池的转换效率;烧结峰值温度为790℃时,更有利于在电池电极位置形成良好的欧姆接触,从而获得最佳的电池转换效率。
关键词(KeyWords): 激光掺杂;太阳电池;单晶硅;PERC;选择性发射极;初始方块电阻;烧结峰值温度
基金项目(Foundation): 国家自然科学基金(61874120);; 江苏省国际科技合作项目(BZ2017033)
作者(Author): 黄国平,王丽婷,邱家梁,黄惜惜,周肃,贾佳,李菁楠
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