曾俞衡,陈晖,张文博,程海良,廖明墩,谢利华,李旺鹏,刘景博,张青山,刘伟,王玉明,闫宝杰,叶继春

• 1:中国科学院宁波材料技术与工程研究所
• 2:中国科学院大学
• 3:苏州拓升智能装备有限公司
• 4:营口金辰机械股份有限公司

摘要(Abstract)：

隧穿氧化硅钝化接触(TOPCon)晶体硅太阳电池(下文简称为“TOPCon太阳电池”)被广泛认为是产业用下一代主流高效晶体硅太阳电池技术，目前仍处于产业化应用开发阶段，在技术路线选择、核心材料制备等方面仍存在不少难题有待解决，尚未实现大规模量产推广。首先介绍了TOPCon太阳电池技术的研究进展，并分析了现有产业技术的不足，这种不足主要体现在现阶段该产业采用的主流的低压化学气相沉积(LPCVD)技术存在不足；然后详细分析了等离子体增强化学气相沉积(PECVD)技术的优、缺点及产业的应用现状，重点介绍了管式PECVD装备及其配套技术(下文简称为“管式PECVD装备技术”)的特点及发展进程，并分析了该装备技术在TOPCon太阳电池量产推广方面的应用潜力。研究结果表明：管式PECVD装备技术在制备低成本、高性能的TOPCon太阳电池用重掺杂多晶硅层和超薄氧化硅层等方面具有综合优势，其在非晶硅层沉积和原位掺杂等关键步骤的实现方面效率更高，可集成超薄氧化硅层的原位制备，又兼具装备价格低、维护简易、可靠性高、占地面积小等优点，因此，管式PECVD装备技术有望成为TOPCon太阳电池生产的一种重要的产业化技术路线。

关键词(KeyWords)： 光伏发电;晶体硅太阳电池;隧穿氧化硅钝化接触;管式PECVD

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(61974178);; 中科院青年促进会项目(2018333);; 浙江省自然科学基金(LY19F040002);; 国家重点研发计划(2018YFB1500403);; 宁波市“科技创新2025”重大专项(2020Z098);; 浙江省重点研发计划(2021C01006);; 2021年辽宁省首批揭榜挂帅科技攻关项目;; 江苏省科技副总项目(FZ20200358)

作者(Author): 曾俞衡,陈晖,张文博,程海良,廖明墩,谢利华,李旺鹏,刘景博,张青山,刘伟,王玉明,闫宝杰,叶继春

DOI: 10.19911/j.1003-0417.tyn20210927.03

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