双氧水的杂质含量对多晶硅片制绒的影响Effect of impurity content of hydrogen peroxide on the fluffing of polycrystalline silicon wafers
于琨,王占友,郑海陆,郭明州,李会玲,贺美亮
摘要(Abstract):
通过硅片减重、表面反射率及SEM测试方法,首次研究了双氧水杂质含量对银铜双离子制绒的影响。结果显示,杂质含量高的双氧水使硅片制绒后比杂质含量低的单片平均少减重0.03 g,同时导致表面反射率高2%;其制备的多晶硅电池的测试参数表现为短路电流降低30 mA,绝对效率降低0.06%。研究结果对于选择合适的双氧水制绒以提升太阳电池效率具有积极意义。
关键词(KeyWords): 双氧水;杂质;制绒;缓蚀剂
基金项目(Foundation):
作者(Author): 于琨,王占友,郑海陆,郭明州,李会玲,贺美亮
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