高效多晶铸锭技术研究
常传波,杨振邦,袁聪,唐骏
摘要(Abstract)：
多晶硅铸造过程中出现了大量杂质和缺陷,造成了多晶硅少子寿命降低。位错是常见的缺陷,极大影响了多晶硅的质量。本文结合多晶硅铸造过程中遇到的问题,重点研究不同形核材料、长晶界面及长晶过程中温度梯度对位错的影响,以提高高效多晶硅片的转换效率。
关键词(KeyWords)： 形核材料;长晶界面;温度梯度;位错
基金项目(Foundation):
作者(Author): 常传波,杨振邦,袁聪,唐骏
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