适用于GaAs多结太阳电池的宽光谱Al_2O_3/SiO_2/Nano-SiO_23层减反射膜的研制
章威,涂洁磊
摘要(Abstract):
减反射膜在太阳电池应用中非常重要,然而传统的双层镀膜减反射膜已无法满足GaAs电池的拓展需要。因此,本研究在之前双层镀膜的基础上进行新薄膜结构的设计优化。使用溶胶-凝胶法制备出新结构的3层减反射膜。通过XRD对薄膜晶体结构进行分析,使用椭偏仪对薄膜折射率和物理厚度进行测试,使用分光光度计对减反射膜减反射效果进行验证。通过对3层减反射膜的折射率和物理厚度进行优化,成功在无窗口层的GaAs衬底上制备出350~1800nm波段平均反射率为10.34%的3层减反射膜。
关键词(KeyWords): 溶胶-凝胶法;纳米减反射膜;3层减反射膜;GaAs
基金项目(Foundation):
作者(Author): 章威,涂洁磊
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